- Title
- Kalman filter enabled high-speed control of a MEMS nanopositioner
- Creator
- Ruppert, Michael G.; Maroufi, Mohammad; Bazaei, Ali; Moheimani, S. O. Reza
- Relation
- 20th IFAC World Congress. 20th IFAC World Congress: Toulouse, France, 9-14 July 2017: Proceedings [presented in IFAC-PapersOnLine, Vol. 50 Iss. 1] (Toulouse, France 9-14 July, 2017) p. 15554-15560
- Publisher Link
- http://dx.doi.org/10.1016/j.ifacol.2017.08.1879
- Publisher
- Elsevier
- Resource Type
- conference paper
- Date
- 2017
- Description
- We demonstrate a novel tracking controller formulation based on a linear time-varying Kalman filter to regulate amplitude and phase of a reference signal independently. The method is applicable to sinusoidal references such as spiral, cycloid and Lissajous trajectories which are commonly used for imaging in high-speed Atomic Force Microscopy (AFM). A Microelectromechanical Systems (MEMS) based nanopositioner, whose fundamental resonance frequency is dampened with an additional damping feedback loop, is employed. For a scan range of 2µm, we demonstrate experimental tracking of sinusoids with frequencies as high as 5kHz, well beyond the open-loop fundamental resonance, with a tracking error of only 4.6 nm.
- Subject
- microsystems; micro mechatronic systems; nano mechatronic systems; positioning systems; Kalman filters; tracking
- Identifier
- http://hdl.handle.net/1959.13/1384479
- Identifier
- uon:32083
- Identifier
- ISSN:2405-8963
- Language
- eng
- Full Text
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